Planar biaxial micropositioning stage

A micropositioning stage is described which may be monolithic and which comprises a first structure which is mounted coplanar with and concentrically within a second structure. Both structures consist essentially of frames and pivoting lever arms which respond to linear force from piezoelectric tran...

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Bibliographische Detailangaben
Hauptverfasser:	SCIRE, FREDRIC E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Beschreibung
Zusammenfassung:	A micropositioning stage is described which may be monolithic and which comprises a first structure which is mounted coplanar with and concentrically within a second structure. Both structures consist essentially of frames and pivoting lever arms which respond to linear force from piezoelectric transducers to move an object mounted on a platform in two different directions one of which may be at right angles to the other. The invention is particularly characterized by permitting biaxial movement of an object in a planar, essentially flat unit. In one embodiment, the present invention is monolithic in the sense that it is a single unitary structure except for the piezoelectric transducer elements.