Mass flow controller apparatus

An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.

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Bibliographische Detailangaben
Hauptverfasser:	GATES, WILLIAM E, PIETERS, WIM J. M
Format:	Patent
Sprache:	eng
Schlagworte:	GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING
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Beschreibung
Zusammenfassung:	An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.