Separation of chlorosilanes by extractive distillation

A method for separating close-boiling chlorosilanes by the procedures of extractive distillation using sulfolane as the extractive solvent is described. An example of close-boiling chlorosilanes which can be separated by this method include dimethyldichlorosilane and methyltrichlorosilane containing...

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Bibliographische Detailangaben
Hauptverfasser: HALM, ROLAND L, FLANINGAM, ORA L
Format: Patent
Sprache:eng
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Zusammenfassung:A method for separating close-boiling chlorosilanes by the procedures of extractive distillation using sulfolane as the extractive solvent is described. An example of close-boiling chlorosilanes which can be separated by this method include dimethyldichlorosilane and methyltrichlorosilane containing mixtures. The invention comprises heating a mixture of the close-boiling chlorosilanes with sulfolane to distill the lower-boiling chlorosilane from the mixture and thereafter separating the sulfolane and the high-boiling chlorosilane.