Soft metal seal

A improved high pressure seal for sealing between a pair of vacuum system elements (10, 12) is disclosed which includes a channel (42) to allow fluid to be vented from the space between a sealing member (30) and a seal on the low pressure side of one of the elements (10, 12) to prevent the trapping...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIEN, NEIL C
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A improved high pressure seal for sealing between a pair of vacuum system elements (10, 12) is disclosed which includes a channel (42) to allow fluid to be vented from the space between a sealing member (30) and a seal on the low pressure side of one of the elements (10, 12) to prevent the trapping of gasses inside of the seal which can contribute to outgassing at a later time. The venting channel (42) is formed either in the deformable sealing member (30) itself, or in one of the two vacuum system elements (10, 12) in its face adjoining the sealing member (30).