Process for forming polymeric paraxylylene coatings and films possessing improved oxidation resistance

Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors ont...

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Bibliographische Detailangaben
Hauptverfasser: BAKER, THOMAS E, FIX, GEORGE L, JUDGE, JOHN S
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors onto a substrate.