Process for forming polymeric paraxylylene coatings and films possessing improved oxidation resistance
Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors ont...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Polymeric paraxylylene coatings and films possessing significantly improved oxidation resistance, particularly at elevated temperatures, are disclosed as well as a process for their preparation wherein certain antioxidants are vaporized and codeposited with vaporous poly(paraxylylene) precursors onto a substrate. |
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