Forming electrically insulating layers by sputter deposition
A method of making inclined sides on a metal pattern which is grown on a substrate by electroplating as a preliminary measure to the coating of the substrate with the metal pattern by an insulating layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etching step...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of making inclined sides on a metal pattern which is grown on a substrate by electroplating as a preliminary measure to the coating of the substrate with the metal pattern by an insulating layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etching step which transforms the rounded edges of the metal pattern into inclined sides. |
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