Transfer machine for sealing electronic or like components under vacuum

An apparatus is provided comprising three elongated vacuum chambers arranged in line one after another whereby a component carrying means may be transferred successively from one chamber to another. Of these three chambers the first and third comprise air locks and the intermediate chamber contains...

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Bibliographische Detailangaben
Hauptverfasser:	VOUMARD, MARTIAL, PEYRAUD, DOMINIQUE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY RESISTORS RESONATORS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	An apparatus is provided comprising three elongated vacuum chambers arranged in line one after another whereby a component carrying means may be transferred successively from one chamber to another. Of these three chambers the first and third comprise air locks and the intermediate chamber contains heat sealing means whereby components undergoing sealing may be soldered under vacuum. By providing a permanent magnet on each end of the component carrying means this may be shifted between vacuum chambers by external application of a magnet. The overall length of the apparatus is reduced since only three chambers are required and the intermediate chamber may be made shorter than would be the case where no such arrangement is provided.