Method of manufacturing film thermopile

A method of manufacturing a film thermopile, whereby a film of a thermoelectric semiconductor material which is an n-type stoichiometric solid solution containing Bi2Te3 and Sb2Te3 is deposited on a substrate. Then heating is effected so that adjacent arms of the film are at different temperatures,...

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Hauptverfasser: NIKOLASHINA, LJUDMILA ALEXEEVNA, GELFGAT, DAVID MENDELEEVICH, CHERNOUSOV, LEV NIKOLAEVICH, ZHEMCHUZHINA, ELENA ALEXANDROVNA, SGIBNEV, IGOR VLADIMIROVICH, LIDORENKO, NIKOLAI STEPANOVICH, KOLOMOETS, NIKOLAI VASILIEVICH, DASHEVSKY, ZINOVY MOISEEVICH, GRANOVSKY, VLADIMIR ISAAKOVICH, SHMIDT, IGOR ARONOVICH
Format: Patent
Sprache:eng
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Zusammenfassung:A method of manufacturing a film thermopile, whereby a film of a thermoelectric semiconductor material which is an n-type stoichiometric solid solution containing Bi2Te3 and Sb2Te3 is deposited on a substrate. Then heating is effected so that adjacent arms of the film are at different temperatures, some at a temperature of not above 300 DEG C, and others at a temperature of not less than 350 DEG C.