Technique for fabrication of foil electret

A technique for the fabrication of thin film electrets designed for use in electroacoustic transducers involves depositing a thin film of aluminum or titanium upon a perfluorinated foil and etching away the film prior to deposition of gold. The resultant structure evidences superior adhesion charact...

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Bibliographische Detailangaben
Hauptverfasser: WEST, JAMES EDWARD, SCHONHORN, HAROLD, SESSLER, GERHARD MARTIN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A technique for the fabrication of thin film electrets designed for use in electroacoustic transducers involves depositing a thin film of aluminum or titanium upon a perfluorinated foil and etching away the film prior to deposition of gold. The resultant structure evidences superior adhesion characteristics and electrical characteristics comparable to those previously described.