Technique for fabrication of foil electret
A technique for the fabrication of thin film electrets designed for use in electroacoustic transducers involves depositing a thin film of aluminum or titanium upon a perfluorinated foil and etching away the film prior to deposition of gold. The resultant structure evidences superior adhesion charact...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A technique for the fabrication of thin film electrets designed for use in electroacoustic transducers involves depositing a thin film of aluminum or titanium upon a perfluorinated foil and etching away the film prior to deposition of gold. The resultant structure evidences superior adhesion characteristics and electrical characteristics comparable to those previously described. |
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