Apparatus for maintaining high precision in a rotating device used with optical apparatus
Apparatus to maintain high precision in the location of an axis about which an object is tilted such as in an electronic microscope, in which the axis position is measured and the measurements compared with stored calibration values, and the difference between the measured and stored values used to...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Apparatus to maintain high precision in the location of an axis about which an object is tilted such as in an electronic microscope, in which the axis position is measured and the measurements compared with stored calibration values, and the difference between the measured and stored values used to drive positioning devices to correct for any error in axis position. |
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