ELECTROSTATIC CHARGE CONTROLLER
Method and apparatus for controlling the electrostatic charge density on a surface by generating an ion current adjacent the surface, partially screening the surface from the generated ion current, and controlling the magnitude and sign of the ion current passing to the surface by means of an applie...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Method and apparatus for controlling the electrostatic charge density on a surface by generating an ion current adjacent the surface, partially screening the surface from the generated ion current, and controlling the magnitude and sign of the ion current passing to the surface by means of an applied bias voltage. A charge sensor/feed back system may be employed to control the bias voltage. |
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