SEMICONDUCTOR TARGET

A semiconductor target comprises a semiconductor substrate and a diode array patterned on the substrate. Diodes are isolated from each other by an insulating film. A p-n junction plane of the diodes is designed to lie over the boundary plane of the substrate and the insulating film.

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Bibliographische Detailangaben
Hauptverfasser: HORIIKE Y,JA, SHIROUZU S,JA, HARADA N,JA, TSUJI S,JA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor target comprises a semiconductor substrate and a diode array patterned on the substrate. Diodes are isolated from each other by an insulating film. A p-n junction plane of the diodes is designed to lie over the boundary plane of the substrate and the insulating film.