METAL CONTACT AND INTERCONNECTION SYSTEM FOR NONHERMETIC ENCLOSED SEMICONDUCTOR DEVICES
Disclosed is a molybdenum-modifying metal ohmic contact and electrical interconnection system for semiconductor devices that are subjected to corrosive environments. A contact and interconnection system is formed using a layer composed of a mixture of molybdenum and a modifier metal, such as titaniu...
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Zusammenfassung: | Disclosed is a molybdenum-modifying metal ohmic contact and electrical interconnection system for semiconductor devices that are subjected to corrosive environments. A contact and interconnection system is formed using a layer composed of a mixture of molybdenum and a modifier metal, such as titanium, the system having the desired characteristics of the molybdenum system but with greatly increased corrosion resistance which allows devices using such a system to be mounted in nonhermetic packages. |
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