SUBLIMATION GETTER PUMP WITH CATHODE TRIGGER MEANS
Sublimation getter pump includes, in one embodiment, a cathode electrode made of an active gas gettering material, an anode electrode closely juxtaposed to the cathode electrode and defining therewith an electric discharge gap, and a trigger electrode assembly in close juxtaposition to the cathode e...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Sublimation getter pump includes, in one embodiment, a cathode electrode made of an active gas gettering material, an anode electrode closely juxtaposed to the cathode electrode and defining therewith an electric discharge gap, and a trigger electrode assembly in close juxtaposition to the cathode electrode. Upon the application of a suitable pulse to the trigger electrode assembly, an electric discharge is established between the cathode and anode electrodes, causing the evolution of active gas gettering material from the cathode electrode. Active gas gettering material is deposited in a clean film upon a closely adjacent surface where it reacts with and removes from the atmosphere active gases, causing the reduction of pressure within the pumped volume. |
---|