APPARATUS AND METHOD FOR VAPORIZING MOLTEN METAL

Apparatus and method for vacuum vaporization of molten metal without entrainment of liquid droplets includes charging a pool of molten metal into a first cylinder member which has its central axis disposed horizontally and has at least one passage therethrough. A second cylinder member, also having...

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Bibliographische Detailangaben
Hauptverfasser: FRANK J. COLE, JOHN M. ROBLIN, WILLIAM A. REED
Format: Patent
Sprache:eng
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Zusammenfassung:Apparatus and method for vacuum vaporization of molten metal without entrainment of liquid droplets includes charging a pool of molten metal into a first cylinder member which has its central axis disposed horizontally and has at least one passage therethrough. A second cylinder member, also having its central axis disposed horizontally, encloses the first cylinder member so as to receive molten metal through the passage. A thin semi-cylindrical shell of fluid metal is thus formed between the cylinder members. Heating the thin shell generates metal vapor. The metal vapor is passed through a tortuous path to remove any liquid droplets, and is discharged from an outlet nozzle for deposition upon a substrate.