METHOD FOR MEASURING RESISTIVITY

The method for measuring the bulk resistivity of an epitaxial semiconductor layer on a monocrystalline semiconductor base with a 4-point probe apparatus wherein the base has at least two high conductivity diffused regions, positioning two current probes directly over two separate diffused regions in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ANDREW DUPNOCK, WILLIAM A. KEENAN, EDWARD F. GOREY
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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