APPARATUS FOR CHEMICALLY ETCHING SURFACES

An apparatus for chemically etching a substantially flat surface of a workpiece such as a semiconductor wafer comprises a vessel containing a fluid etchant, means for producing a toroidal turbulence in the etchant, and a substantially circular, inverted, conical deflecting surface around the workpie...

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Bibliographische Detailangaben
Hauptverfasser:	WILLIAM NELSON HENRY, RAYMOND ARTHUR ALLEMAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE NOZZLES PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	An apparatus for chemically etching a substantially flat surface of a workpiece such as a semiconductor wafer comprises a vessel containing a fluid etchant, means for producing a toroidal turbulence in the etchant, and a substantially circular, inverted, conical deflecting surface around the workpiece for deflecting falling fluid from the peripheral region of the toroidal turbulence toward the workpiece surface. The central axes of the toroidal turbulence, and the deflecting surface coincide.