MEASUREMENT OF SEMICONDUCTOR RESISTIVITY PROFILES BY MEASURING VOLTAGES,CALCULATING APPARENT RESISTIVITIES AND APPLYING CORRECTION FACTORS

MEASUREMENT OF SEMICONDUCTOR RESISTIVITY PROFILES BY MEASURING VOLTAGES,CALCULATING APPARENT RESISTIVITIES AND APPLYING CORRECTION FACTORS

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Hauptverfasser: EDWARD E. GARDNER, TSU-HSING YEH, PAUL A. SCHUMANN JR, EDWARD F. GOREY
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator EDWARD E. GARDNER
TSU-HSING YEH
PAUL A. SCHUMANN JR
EDWARD F. GOREY
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title MEASUREMENT OF SEMICONDUCTOR RESISTIVITY PROFILES BY MEASURING VOLTAGES,CALCULATING APPARENT RESISTIVITIES AND APPLYING CORRECTION FACTORS
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