Method for measurement of vacuum pressure

1,013,818. Radiation vacuum gauges. UNITED STATES ATOMIC ENERGY COMMISSION. April 16, 1963 [June 6,1962], No. 14815/63. Heading G1A [Also in Division H1] A radiation vacuum gauge comprises means for exciting residual gas atoms by electron interaction therewith to produce light quanta, and means for...

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1. Verfasser: MCFARLAND ROBERT H
Format: Patent
Sprache:eng
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Zusammenfassung:1,013,818. Radiation vacuum gauges. UNITED STATES ATOMIC ENERGY COMMISSION. April 16, 1963 [June 6,1962], No. 14815/63. Heading G1A [Also in Division H1] A radiation vacuum gauge comprises means for exciting residual gas atoms by electron interaction therewith to produce light quanta, and means for observing said light quanta as a function of the gas pressure. The vacuum system being gauged, 11 includes an electron gun 13 which projects a beam of electrons across a test region 24. Excited atoms radiate light quanta, which are detected by a photomultiplier 31 the output of which is recorded. To reduce noise effects, the electron gun is fed from a pulse generator 23 and a filter 34 is tuned to the pulse repetition frequency. Optical filters 32 may be used to select particular emission wavelengths for the investigation of partial pressures.