Processing semiconductor rods

The diameter of a molten zone 4, passed through a silicon rod 1 by movement along the rod of a surrounding induction coil 5, is automatically maintained constant by upward or downward movement of an upper clamp 20 which is responsive to change in the current in coil 5 caused by change in the diamete...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RUMMEL THEODOR, KELLER WOLFGANG, QUAST HANS-FRIEDRICH
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The diameter of a molten zone 4, passed through a silicon rod 1 by movement along the rod of a surrounding induction coil 5, is automatically maintained constant by upward or downward movement of an upper clamp 20 which is responsive to change in the current in coil 5 caused by change in the diameter of the zone 4 (see Group XXXV). The diameter of the rod may be varied by deliberately varying the current fed to the coil.