GUIDING DEVICE, GUIDING METHOD, MEASUREMENT DEVICE, OBJECT MANUFACTURING FACILITY, MEASURING METHOD, OBJECT MANUFACTURING METHOD, AND OBJECT QUALITY CONTROL METHOD

GUIDING DEVICE, GUIDING METHOD, MEASUREMENT DEVICE, OBJECT MANUFACTURING FACILITY, MEASURING METHOD, OBJECT MANUFACTURING METHOD, AND OBJECT QUALITY CONTROL METHOD

A guiding device includes: a guiding unit configured to guide a scanning position of a measurement unit with respect to a measurement target when the measurement unit configured to measure a physical quantity of the measurement target performs scanning. The guiding unit includes at least two linear...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UEMATSU, Kento, TERADA, Kazuki, MATSUI, Yutaka, IMANAKA, Hiroki
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A guiding device includes: a guiding unit configured to guide a scanning position of a measurement unit with respect to a measurement target when the measurement unit configured to measure a physical quantity of the measurement target performs scanning. The guiding unit includes at least two linear first guide markers configured to guide the scanning position, and the at least two linear first guide markers are arranged at positions ahead of a measurement position of the measurement unit in a scanning direction at predetermined intervals with the scanning position being interposed therebetween.