MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOVABLE MIRROR AND A SUBSTRATE

MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOVABLE MIRROR AND A SUBSTRATE

A MEMS micromirror device comprising, a reflective movable mirror and an underlying substrate. A viscous liquid or gel is located between the movable mirror and substrate.

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Milanovic, Veljko
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A MEMS micromirror device comprising, a reflective movable mirror and an underlying substrate. A viscous liquid or gel is located between the movable mirror and substrate.