INTEGRATED CAPACITOR

Integrated capacitors are described. In an example, an integrated capacitor structure includes alternating first metal lines and second metal lines in a dielectric layer of a metallization layer in a stack of metallization layers, the first metal lines coupled together, and the second metal lines co...

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Bibliographische Detailangaben
Hauptverfasser: JENSEN, Jonathan C, MORAN GUIZAN, Carla, YAKKEGONDI VIRUPAKSHAPPA, Mamatha, SACHITHANANDAN, Roshini, BAUMGARTNER, Peter, RIESS, Philipp, LANGENBUCH, Michael
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Integrated capacitors are described. In an example, an integrated capacitor structure includes alternating first metal lines and second metal lines in a dielectric layer of a metallization layer in a stack of metallization layers, the first metal lines coupled together, and the second metal lines coupled together. A metal plate is over or beneath the alternating first metal lines and second metal lines. The metal plate is coupled to the first metal lines or the second metal lines by vias.