SCANNING PROBE MICROSCOPE

SCANNING PROBE MICROSCOPE

A control device is configured to perform control to move the optical microscope from an initial position to a position at which the optical microscope is focused on the observation target while confirming the focus, store information capable of identifying a relative position between the optical mi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: YAMASAKI, Kenji
Format: Patent
Sprache:eng
Schlagworte:
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Beschreibung
Zusammenfassung:A control device is configured to perform control to move the optical microscope from an initial position to a position at which the optical microscope is focused on the observation target while confirming the focus, store information capable of identifying a relative position between the optical microscope and the observation target in a focused state (S3), move the optical microscope to the relative position based on the stored information and then move the optical microscope to a position at which the optical microscope is focused on the observation target while confirming the focus.