ULTRASONIC SENSOR WITH TUNABLE METAL LAYER THICKNESS TO MATCH ULTRASONIC FREQUENCY

ULTRASONIC SENSOR WITH TUNABLE METAL LAYER THICKNESS TO MATCH ULTRASONIC FREQUENCY

An apparatus includes an ultrasonic sensor stack configured to transmit and receive ultrasonic waves. The ultrasonic sensor stack includes at least a thin film transistor layer, a piezoelectric layer, and a thin electrode layer. The ultrasonic sensor stack further includes a tunable metal layer coup...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: STROHMANN, Jessica Liu, CHAN, Michelle Ma Thin Thin Htay, TSENG, Chin-Jen, BADGE, Ila
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
FOR PERFORMING MECHANICAL WORK IN GENERAL
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Beschreibung
Zusammenfassung:An apparatus includes an ultrasonic sensor stack configured to transmit and receive ultrasonic waves. The ultrasonic sensor stack includes at least a thin film transistor layer, a piezoelectric layer, and a thin electrode layer. The ultrasonic sensor stack further includes a tunable metal layer coupled to the thin electrode layer and an acoustic layer coupled to the tunable metal layer, where the tunable metal layer has a thickness greater than a thickness of the thin electrode layer. The thickness of the tunable metal layer may be configured to match a peak frequency in an ultrasonic frequency range of the ultrasonic waves transmitted by the ultrasonic sensor stack. In some implementations, the tunable metal layer includes a copper layer and the acoustic layer includes polyimide or polyethylene terephthalate.