SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

An anode region and a cathode region of a photodiode are formed in a semiconductor substrate. At a main surface of the semiconductor substrate, a plurality of first STI regions are formed on the cathode region, and an oxide film is formed between the plurality of first STI regions. A shield electrod...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TSUBAKI, Shigeki, KOSHIMIZU, Makoto
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An anode region and a cathode region of a photodiode are formed in a semiconductor substrate. At a main surface of the semiconductor substrate, a plurality of first STI regions are formed on the cathode region, and an oxide film is formed between the plurality of first STI regions. A shield electrode is formed on the plurality of first STI regions and the oxide film. A thickness of each of the plurality of first STI regions is smaller than a thickness of second STI region.