MAGNETIC SENSOR DEVICE
A magnetic sensor device 1 includes a support substrate 2 and a sensor substrate 10 fixed to the support substrate 2. The sensor substrate 10 includes a first surface 10B facing the support substrate 2 and a second surface 10A that is located on an opposite side to the first surface 10B and that is...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A magnetic sensor device 1 includes a support substrate 2 and a sensor substrate 10 fixed to the support substrate 2. The sensor substrate 10 includes a first surface 10B facing the support substrate 2 and a second surface 10A that is located on an opposite side to the first surface 10B and that is provided with a functional film 20 including a plurality of magnetic detection elements E, a hole portion 11 is formed in the first surface 10B, an outline O11 of the hole portion 11 includes at least one corner C1, C2, C3 . . . , at least one corner C1, C2, C3 . . . includes a first corner C1 that overlaps at least one of the plurality of magnetic detection elements E in a plan view seen in a plane-normal direction Z from the second surface 10A to the first surface 10B, and the first corner C1 has a radius of curvature of 5 μm or more. |
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