PIEZOELECTRIC VALVE

A piezoelectric valve includes: actuators having valve discs and configured to drive these valve discs individually; a valve seat plate having valve seats contacted with and separated from the valve discs individually and discharge paths; and a body case accommodating the valve seat plate, and each...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUSHITA, Tadashi, CHEE, Sze Keat, WANG, Zhengli, ITO, Takafumi
Format: Patent
Sprache:eng
Schlagworte:
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