PIEZOELECTRIC VALVE
A piezoelectric valve includes: actuators having valve discs and configured to drive these valve discs individually; a valve seat plate having valve seats contacted with and separated from the valve discs individually and discharge paths; and a body case accommodating the valve seat plate, and each...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A piezoelectric valve includes: actuators having valve discs and configured to drive these valve discs individually; a valve seat plate having valve seats contacted with and separated from the valve discs individually and discharge paths; and a body case accommodating the valve seat plate, and each actuator is fixed to the side face of the valve seat plate so that the valve discs face the valve seats and can be attached to and detached from a fluidic device via a connector part provided to the front face of the body case. The valve seats are provided as a pair to both faces of the valve seat part, the discharge paths opened in the valve seats provided as a pair are formed in the valve seat plate, gas discharge ports are opened in a non-straight manner, and discharge ports of discharge passages are opened in a line. |
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