METHOD FOR PROCESSING DC MARKS FOR REPAIRING LITHOGRAPHY MASKS

METHOD FOR PROCESSING DC MARKS FOR REPAIRING LITHOGRAPHY MASKS

The disclosure relates to a method for processing a lithography object. The method comprises using a particle beam and an etching gas to process a marking in order to reduce the volume of the marking, the marking having been deposited on the object and remaining on the object. The invention also rel...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Oster, Jens, Szafranek, Bartholomaeus, Hanefeld, Marc
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:The disclosure relates to a method for processing a lithography object. The method comprises using a particle beam and an etching gas to process a marking in order to reduce the volume of the marking, the marking having been deposited on the object and remaining on the object. The invention also relates to a corresponding computer program and a corresponding device.