X-RAY INSPECTION APPARATUS AND INSPECTION METHOD OF X-RAY SENSOR UNIT

An X-ray inspection apparatus includes an irradiation unit configured to irradiate a conveyed article with X-rays, an X-ray sensor unit including a sensor unit configured to detect the X-rays by photon counting and an image generation unit configured to generate an image based on a detection result...

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Bibliographische Detailangaben
Hauptverfasser: HIROSE, Osamu, YURUGI, Futoshi, YOSHIDA, Keisuke
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An X-ray inspection apparatus includes an irradiation unit configured to irradiate a conveyed article with X-rays, an X-ray sensor unit including a sensor unit configured to detect the X-rays by photon counting and an image generation unit configured to generate an image based on a detection result output from the sensor unit, and a control unit having a first mode for inspecting the article based on the image and a second mode for determining a state of the X-ray sensor unit at a time of time delay integration driving, in which the control unit is configured to compare a first image generated based on a detection result output from the sensor unit at a time t1 with a second image generated by integrating detection results output from the sensor unit until a time t2 after the time t1 to determine the state of the X-ray sensor unit.