REFLECTORS FOR A PHOTONICS CHIP

Structures for a photonics chip that include a reflector and methods of forming such structures. The structure comprises a reflector including a dielectric layer on a semiconductor substrate, a plurality of trenches in the dielectric layer, and a reflector layer. Each trench includes a plurality of...

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Bibliographische Detailangaben
Hauptverfasser: Sporer, Ryan, Bian, Yusheng, Nummy, Karen
Format: Patent
Sprache:eng
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Zusammenfassung:Structures for a photonics chip that include a reflector and methods of forming such structures. The structure comprises a reflector including a dielectric layer on a semiconductor substrate, a plurality of trenches in the dielectric layer, and a reflector layer. Each trench includes a plurality of sidewalls, and the reflector layer includes a portion on the sidewalls of each trench. The structure further comprises a photonic component over the reflector.