VALVE MODULE, FLUID CONTROL APPARATUS, AND ELECTRONIC APPARATUS
Provided is a valve module that includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side op...
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creator | KAWAGUCHI, HIROTO HORIUCHI, YUYA MATSUSHITA, TAKUMA SUZUKI, HIROSHI MIZUTA, DAISUKE |
description | Provided is a valve module that includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side opposite to the first surface. The support member has higher rigidity than rigidity of the movable member, covers a part of a region of the second surface, in which the opening is not located as viewed in a direction perpendicular to the second surface, and is fixed to the member. |
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The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side opposite to the first surface. The support member has higher rigidity than rigidity of the movable member, covers a part of a region of the second surface, in which the opening is not located as viewed in a direction perpendicular to the second surface, and is fixed to the member.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS |
title | VALVE MODULE, FLUID CONTROL APPARATUS, AND ELECTRONIC APPARATUS |
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