VALVE MODULE, FLUID CONTROL APPARATUS, AND ELECTRONIC APPARATUS

Provided is a valve module that includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side op...

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Bibliographische Detailangaben
Hauptverfasser:	KAWAGUCHI, HIROTO, HORIUCHI, YUYA, MATSUSHITA, TAKUMA, SUZUKI, HIROSHI, MIZUTA, DAISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	Provided is a valve module that includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side opposite to the first surface. The support member has higher rigidity than rigidity of the movable member, covers a part of a region of the second surface, in which the opening is not located as viewed in a direction perpendicular to the second surface, and is fixed to the member.