INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEARNING APPARATUS, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE-LEARNING METHOD

The present invention relates to an information processing apparatus, an inference apparatus, a machine-learning apparatus, an information processing method, an inference method, and a machine-learning method. The information processing apparatus (5) includes an information acquisition section (500)...

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Hauptverfasser: MEGURO, Takayoshi, NAKAGOMI, Ryo
Format: Patent
Sprache:eng
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Zusammenfassung:The present invention relates to an information processing apparatus, an inference apparatus, a machine-learning apparatus, an information processing method, an inference method, and a machine-learning method. The information processing apparatus (5) includes an information acquisition section (500) configured to acquire alarm generation information including at least alarm-type information and substrate-location information, the alarm-type information indicating a type of alarm that is generated in a substrate processing device (2) including modules and is configured to perform polishing process on substrates, the substrate-location information indicating a location state of the substrates in the modules when the alarm is generated; and a support processing section (501) configured to generate support information corresponding to the alarm by inputting the alarm generation information acquired by the information acquisition section (500) in response to the generation of the alarm to a learning model that has learned by machine learning a correlation between the alarm generation information and the support information for dealing with generation of the alarm.