OFFSET VOIDING SCHEME FOR VERTICAL INTERCONNECTS

An integrated circuit (IC) package includes a via extending through a stack of antipads in a stack of layers, and the stack of antipads has an antipad with a shorter diameter between antipads with longer diameters. The via may have first and second connections and first and second pads at or over an...

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Bibliographische Detailangaben
Hauptverfasser: Kong, Jackson Chung Peng, Tan, Aik Hong, Chew, Li Wern
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An integrated circuit (IC) package includes a via extending through a stack of antipads in a stack of layers, and the stack of antipads has an antipad with a shorter diameter between antipads with longer diameters. The via may have first and second connections and first and second pads at or over and under the antipads. The longer diameters (over and under the shorter diameter) may be equal. Intervening antipads of intermediate size may be between the smallest antipads and the largest antipads. An antipad void profile may be tapered and concave, with flatter slopes nearer the upper and lower ends of the via and steeper slopes near a via midpoint. A second via may be adjacent the first via. One or more other vias may have an aligned (rather than a tapered) profile.