SPIN ON CARBON COMPOSITION AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

A spin on composition includes a carbon backbone polymer; a first crosslinker; and a second crosslinker. The first crosslinker partially crosslinks the carbon backbone polymer at a temperature ranging from 100° C. to 170° C., and the second crosslinker crosslinks the carbon backbone polymer at a temperature ranging from 180° C. to 300° C. The second crosslinker is selected from the group consisting of A-(OH)x, A-(OR′)x, A-(C═C)x, and A-(C≡C)x, where A is a monomer, oligomer, or a second polymer having a molecular weight ranging from 100 to 20,000, R′ is an alkyloxy group, an alkenyl group, or an alkynyl group, and x ranges from 2 to 1000. The second crosslinker is different from the first crosslinker, and when either of the first crosslinker or the second crosslinker is a polymer, the polymer is a different polymer than the carbon backbone polymer.