MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

Embodiments of multi-chamber processing tools are provided herein. In some embodiments, a multi-chamber processing tool includes: a factory interface configured to receive a substrate; a pre-heat chamber directly coupled to the factory interface; a load lock chamber coupled to the factory interface...

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Bibliographische Detailangaben
Hauptverfasser: GOH, Clinton, KOH, Tuck Foong, WEI, Junqi, LIEW, Kai Liang, JUPUDI, Ananthkrishna, AGARWAL, Prashant
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Embodiments of multi-chamber processing tools are provided herein. In some embodiments, a multi-chamber processing tool includes: a factory interface configured to receive a substrate; a pre-heat chamber directly coupled to the factory interface; a load lock chamber coupled to the factory interface and having a first slit valve disposed therebetween, wherein the load lock chamber is coupled to a pump configured to create a vacuum environment when the first slit valve is in a closed position; a degas chamber coupled to the factory interface and having a second slit valve, wherein the degas chamber is coupled to a second pump configured to create a vacuum environment when the second slit valve is in a closed position, and wherein the degas chamber includes a heat source; one or more process chambers; and a transfer chamber coupled to the load lock chamber, the degas chamber, and the one or more process chambers.