SURFACE SHAPE MEASURING APPARATUS AND SURFACE SHAPE MEASURING METHOD

A surface shape measuring apparatus for measuring a specular surface includes an illuminator configured to illuminate the specular surface with a first light pattern, an imaging device configured to capture an image of a second light pattern which is light transmitted through the illuminator after the first light pattern from the illuminator is reflected by the specular surface, and a processing apparatus configured to acquire a positional deviation amount of the second light pattern from a predetermined position in the image captured by the imaging device, and to output information related to a surface shape of the specular surface acquired from the positional deviation amount.