PURGE DEVICE

A purge device includes a placement section on which a container is placed by a transfer device, a purge nozzle provided in the placement section, a controller configured to perform control to execute a purging process in which purge gas is supplied through the purge nozzle into the container placed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: lto, Yasuhisa, Yamaji, Takashi, Wada, Yoshiya
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A purge device includes a placement section on which a container is placed by a transfer device, a purge nozzle provided in the placement section, a controller configured to perform control to execute a purging process in which purge gas is supplied through the purge nozzle into the container placed on the placement section, and an entry detection sensor configured to detect the entry of the transfer device or the container to the space directly above the placement section from a front side or a depth side of the placement section when the transfer device causes the container to enter the space directly above the placement section. Based on the detection results of the entry detection sensor, the controller performs control to discharge the purge gas from the purge nozzle before the purging process is performed.