COATING DEVICE

A coating device includes: a stage transfer part including a first long shaft extending in a first direction and a second long shaft extending in a second direction intersecting the first direction; a stage tilting part disposed on the stage transfer part, where the stage tiling part swings about a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, Jong Hyup, BACK, Sang Hoon, KIM, Hyun Jin, YANG, Hae Wook, KIM, Yong Hwan, BAE, Min Ho
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A coating device includes: a stage transfer part including a first long shaft extending in a first direction and a second long shaft extending in a second direction intersecting the first direction; a stage tilting part disposed on the stage transfer part, where the stage tiling part swings about a first swing axis; a stage rotating part disposed on the stage tilting part, where the stage rotating part rotates about a first rotating axis intersecting the first swing axis; a stage aligning part disposed on the stage rotating part, where the stage aligning part includes a first short shaft extending in the first direction and a second short shaft extending in the second direction; and a stage disposed on the stage aligning part, wherein a coating target is seated on the stage, where the stage includes a monitoring camera disposed in a camera seating space defined inside the stage.