SEMICONDUCTOR DEVICE AND METHOD

In accordance with some embodiments a via is formed over a semiconductor device, wherein the semiconductor device is encapsulated within an encapsulant 129. A metallization layer and a second via are formed over and in electrical connection with the first via, and the metallization layer and the sec...

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Bibliographische Detailangaben
Hauptverfasser: Tsai, Hui-Jung, Yu, Chen-Hua, Kuo, Hung-Jui, Ko, Ting-Chu, Pu, Han-Ping, Liu, Chung-Shi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In accordance with some embodiments a via is formed over a semiconductor device, wherein the semiconductor device is encapsulated within an encapsulant 129. A metallization layer and a second via are formed over and in electrical connection with the first via, and the metallization layer and the second via are formed using the same seed layer. Embodiments include fully landed vias, partially landed vias in contact with the seed layer, and partially landed vias not in contact with the seed layer.