SENSOR
A sensor that includes: a piezoelectric film including an upper principal surface and a lower principal surface aligned in an up-down direction; a lower electrode on the lower principal surface of the piezoelectric film; an electrode member including an upper electrode; and a bonding member that fix...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A sensor that includes: a piezoelectric film including an upper principal surface and a lower principal surface aligned in an up-down direction; a lower electrode on the lower principal surface of the piezoelectric film; an electrode member including an upper electrode; and a bonding member that fixes the electrode member to the upper principal surface of the piezoelectric film. A Young's modulus of the bonding member is 0 MPa to 10 MPa. |
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