SEMICONDUCTOR LASER ELEMENT AND METHOD FOR MANUFACTURING THE SAME

A semiconductor laser element includes a substrate and a semiconductor stacked structure that is provided on one face of the substrate. The semiconductor stacked structure includes an optical waveguide. A pair of first recesses are provided in an other face of the substrate, the pair of first recess...

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Bibliographische Detailangaben
Hauptverfasser: NAKATSU, Koji, OKAWAUCHI, Yoshihiko
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor laser element includes a substrate and a semiconductor stacked structure that is provided on one face of the substrate. The semiconductor stacked structure includes an optical waveguide. A pair of first recesses are provided in an other face of the substrate, the pair of first recesses extending in the resonator length direction. Both end portions of each of the pair of first recesses are located in positions recessed from end faces of the semiconductor stacked structure. Second recesses are provided in the semiconductor stacked structure, the second recesses extending from the end faces of the semiconductor stacked structure in the resonator length direction. In a top view, the second recesses are provided on both sides of the optical waveguide, and are each provided between a corresponding one of the pair of first recesses and the optical waveguide.