INTEGRATED CIRCUIT METAL GATE STRUCTURE

INTEGRATED CIRCUIT METAL GATE STRUCTURE

A semiconductor device includes a gate dielectric layer and a gate electrode formed on the gate dielectric layer. The gate electrode includes a first metal layer, a second metal layer, and a third metal layer. The second layer includes metal and oxygen. The first layer is first layer over the gate d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Hou, Yong-Tian, Hung, Cheng-Lung, Chen, Chien-Hao, Chao, Yuan-Shun
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor device includes a gate dielectric layer and a gate electrode formed on the gate dielectric layer. The gate electrode includes a first metal layer, a second metal layer, and a third metal layer. The second layer includes metal and oxygen. The first layer is first layer over the gate dielectric layer and may include one of titanium nitride (TiN), titanium silicon nitride (TiSiN), or tantalum carbide (TaC). Minimization of equivalent oxide thickness may result.