SEMICONDUCTOR DEVICE AND METHODS OF FORMATION
A cladding sidewall layer footing is removed prior to formation of a hybrid fin structure. Removal of the cladding sidewall layer footing prevents a metal gate footing from forming under the hybrid fin structure when the cladding sidewall layer is removed to enable the metal gate to be formed around...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A cladding sidewall layer footing is removed prior to formation of a hybrid fin structure. Removal of the cladding sidewall layer footing prevents a metal gate footing from forming under the hybrid fin structure when the cladding sidewall layer is removed to enable the metal gate to be formed around the nanostructure channels of a nanostructure transistor. Cladding sidewall layers can be formed in an asymmetric manner to include different lengths and/or angles, among other examples. The asymmetric cladding sidewall layers enable asymmetric metal gate structures to be formed for p-type and n-type nanostructure transistors while preventing metal gate footings from forming under hybrid fin structures for p-type and n-type nanostructure transistors. This may reduce a likelihood of short channel effects and leakage within the nanostructure transistors yield of nanostructure transistors formed on a semiconductor substrate. |
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