FLEXIBLE SENSOR AND METHOD FOR MANUFACTURING FLEXIBLE SENSOR

A flexible sensor includes a main substrate having flexibility, a transistor over the main substrate, a support substrate over the transistor, wherein the support substrate has flexibility and at least an outer surface of the support substrate comprises a material having electric insulation, and a v...

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Bibliographische Detailangaben
Hauptverfasser: Hatayama, Katsuhiro, Shim, Changhoon, Kanazawa, Shusuke, Kito, Yoshiaki, Koizumi, Shohei, Itagaki, Motoshi
Format: Patent
Sprache:eng
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Zusammenfassung:A flexible sensor includes a main substrate having flexibility, a transistor over the main substrate, a support substrate over the transistor, wherein the support substrate has flexibility and at least an outer surface of the support substrate comprises a material having electric insulation, and a variable resistance part over a first surface which is an upper surface of the support substrate, in which a resistance value of the variable resistance part changes according to strain of the variable resistance part.