METHOD OF FABRICATING SUPER-JUNCTION BASED VERTICAL GALLIUM NITRIDE JFET AND MOSFET POWER DEVICES

A vertical MOSFET includes a substrate and a first III-nitride layer of a first conductivity type and having a first dopant concentration coupled to the substrate. First trenches are within the first III-nitride layer. A second III-nitride structure of a second dopant concentration and a second conductivity type opposite to the first conductivity type are within the first trenches. A third III-nitride layer of the second conductivity type is coupled to the first III-nitride layer and the second III-nitride structure. A fourth III-nitride layer of the first conductivity type coupled to the third III-nitride layer. Second trenches are within the third and fourth III-nitride layers. A gate dielectric and a gate conductor are within the second trenches. A source conductor is coupled to an upper portion of the fourth III-nitride layer. The first III-nitride layer and the second III-nitride structure provide a charge balance structure.