CERAMIC HEATER

An upper surface of a ceramic base member of a ceramic heater includes a plurality of projected parts and a surrounding projected part. The surrounding projected parts surround the periphery of a lift-pin hole. In a case where the height of the surrounding projected part is H1 (m), the height of eac...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SEKIYA, Shusuke, MITSUYA, Kohei
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An upper surface of a ceramic base member of a ceramic heater includes a plurality of projected parts and a surrounding projected part. The surrounding projected parts surround the periphery of a lift-pin hole. In a case where the height of the surrounding projected part is H1 (m), the height of each of the plurality of projected parts is H2 (m), and a difference (H2−H1) between the height H2 (m) and the height H1 (m) is Δ (m), H1