SEMICONDUCTOR DEVICE HAVING MORE SIMILAR CELL DENSITIES IN ALTERNATING ROWS, AND METHOD OF FORMING THE SAME

A semiconductor device includes an area including cell regions arranged in alternating first and second rows extending in a first direction, relative to a second direction substantially perpendicular to the first direction, the first rows having a first height, and the second rows having a second height different from the first height; a majority of the cell regions having the first height; a minority of the cell regions having a third height that is at least a sum of the first height and the second height; and for first and second types of cell regions, the first type of cell region having the first height and the second type of cell region having the third height, the first type of cell region having a width greater than a width of the second type of cell region.